Design & Fabrication of MEMS (EEL 6935-001) - Spring 2002
Dr. Shekhar Bhansali, Instructor
ENB370, 974-3593, bhansali@eng.usf.edu
Scott Samson (temp)
727-553-3915, samson@marine.usf.edu
TA: Shyam Aravamudhan
974-2858, saravamu@eng.usf.edu
Objective of the course:
- (1) Impart hands-on, real-life example of life cycle of MEMS devices.
- (2) Introduce and work with several design tools & processing
techniques for MEMS.
- (3) Design, prototype and test a simple MEMS device.
Textbook: Steven Senturia, Microsystem Design, Kluwer, 2001
(web: mit.edu/microsystem-design/www)
Prerequisite: Intro to MEMS / IC Processing or instructor approval.
Assumptions:
You are familiar with MEMS concepts.
You have not designed MEMS devices.
Course Outline:
- (1) Introduction
- (2) Device Layout & Performance Issues
- - Material selection
- - Process modeling
- - Device modeling
- - Sensitivity Analysis
- (3) Fabrication
- - CMR intro
- - Mask fabrication & photolithography
- - Oxidation
- - Thin-film deposition
- - Doping & Implants
- - Etching (wet/dry)
- - Device fabrication
- - Wafer bonding
- (4) Characterization.
Academic Dishonesty - It is not acceptable to copy, plagiarize or
otherwise make use of the work of others in completing homework, project,
exam or other course assignments. The minimum penalty for doing so is an
automatic zero on the assignment and an "F" in the course. If there are
any questions regarding this policy they should be asked.
Grading:
- 20-40% Homework: Regular/CAD
- 20% Midterm
- 20-30% Fabrication
- 30% Final
- 10-20% Presentation